Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
متن کاملScreened field enhancement factor for the floating sphere model of a carbon nanotube array
Related Articles Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests J. Appl. Phys. 110, 103305 (2011) The hysteresis phenomenon of the field emission from the graphene film Appl. Phys. Lett. 99, 173104 (2011) Temperature dependence of the field emission from the few-layer graphene film Appl. Phys. Lett. 99, 163103 (2011) Atomic layer coating of ...
متن کاملUltrasonic Vibration Assisted Electro-Discharge Machining
An ultrasonic vibration has been superposed on the normal electrode movement to increase the flushing effect during a micro electro-discharge machining (EDM) process. A systematic study on the effects of ultrasonic vibration on the EDM performance for fabricating microholes in Nitinol has been completed. The introduction of ultrasonic vibration to the microEDM process has more than 60 times inc...
متن کاملBatch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)
Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
متن کاملIn Situ Micro Gripper Shaping by Electro Discharge Machining
Bio technologies, electronic components, MEMS or watch industry require handling and positioning of ever smaller micro-parts (ten to hundred μm size). Several tools used for such tasks, called micro-grippers have been developed based on different catching and releasing principles. Vacuum grippers are mainly used in the macro world and have been successfully downsized to fulfill micro-world appl...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2011
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.3663438